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产品名称:单晶硅表面研磨机
详细介绍:

品牌: G&N

 

产品名称: 单晶硅表面研磨机

 

型号:MPS-3-134-TWIN

 

 

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G&N-Longitudinal Grinding Machine Type MPS 3 – 134 –TWIN

表面研磨机(可根据具体需求配置成表面研磨和倒角一体机)

For surface grinding and optionally also chamfering of square Silicon blocks with a side length of 125 mm / 150 mm  or 156 mm.
For grinding of blocks with lengths of 110 mm up to 290 mm depending on the accessories chosen.

可进行表面研磨和/或倒角研磨,适用于尺寸125/150/156,长度110MM290MM长度的单晶硅棒。

Equipped with:/主要配置有:

TWIN-Spindle (90-00720-0025)/双轴研磨装置
for working the generated surfaces, max 156 x 156 x 300 mm

最大研磨尺寸:156*156*300MM
The TWIN spindle operation enables a polish /grinding process with two grinding wheels of different grit sizes, without changing the grinding wheels. (Grinding is done in two grinding steps). The coolant distributor nozzle as well as one set of flanges (60-00328-0011) for the TWIN-grinding wheel is included in the basic machine.

一个粗磨,一个精磨,基本配置里包含冷却液分配器喷嘴和一套双轴研磨轮的法兰。

Wheel cover (60-00305-0136)/研磨罩
for cup grinding wheel diameter 220 mm

杯型研磨砂轮直径220MM

Motor driven longitudinal table /工作台驱动电机
The longitudinal table which is equipped with a back lash free needle point bearing, is moved and positioned by a ball bearing spindle driven by a servomotor. The set machine parameters adjust the table speed depending on the grinding process.

Table travel                  770 mm
Table speed                 0 - 10 m/min

Grinding head with fine feed unit/精密进给单元

The grinding head is supported by a finish ground column sleeve which is vertically mounted in the machine base by a backlash free slide bearing. Positioning of the grinding head is made by a stepping motor with ball bearing spindle.

Reproducible feed step              1 µm
Fine feed range                   125 mm

Vacuum unit/真空系统
Consisting of:
Vacuum pump with flanged driving motor with multi-range windings, complete with hoses and totally wired.

The vacuum is required for clamping the work pieces at the grippers and the table during the grinding process. Through the watering air pump system used, in-sucked coolant is absorbed and is automatically separated. All control valves for vacuum, cleaning water and air pressure are easily accessible.

Pump capacity:            max. 27 m³/h
Max.: vacuum:             100 Torr

Coolant enclosure for wet grinding process/冷却罩
The coolant enclosure is equipped with a sliding door, which opens and closes automatically for loading the work pieces. Additionally there is an opening for servicing the chamfering spindle.

Manually Operated Shower Nozzle (90-00724-0002) /手动喷淋嘴
including 1,5 m hose, for cleaning the clamping device and work pieces

配有1.5米软管,用于清洗夹具和工件

Standard Equipment/标准操作工具一套

A complete set of tools for operating the machine

Safety Interlock/安全控制锁

This device automatically prevents operation of the down feed when the clamping device is not switched on, or the tension force drops below the set value.

Electronic Equipment/电控系统
The control cabinet includes the complete control unit incl. programmable controller as well as all the switchgear for power supply and machine control including a Siemens PLC, S7 –300 and / or S7 400.

电控柜包括PLC 和电源供电以及设备控制的所有开关装置和西门子PLCS7-300或者S7-400
Control Voltage                   24 V DC
Power supply                     400 V, 50 cycle, 3 Ph + PE
Connecting power               15  kVA

Automatic Down feed/自动向下进给单元

Electronic control for down feed of the grinding head can be adjusted at the operating panel as well as the drive motor’s stepping controller. Depending on the grinding modes, up to three different grinding parameter recipes can be stored.

The parameters of the grinding head for starting position, feed rates and spark out are freely programmable.

Technical Data/主要技术参数
Roughing down feed                         1- 500 µm/double stroke

粗研磨向下进给                                                    1- 500 µm/双冲程
Finishing down feed                          1- 500 µm/double stroke

精细研磨向下进给                                                 1- 500 µm/双冲程
Spark out
/断火                                  0 - 999 sec.
Smallest programmable down feed step   1 µm
最小向下进给                                                        1µm

Set of Anti Vibration Pads (90-00451-0064) /一套抗震动衬垫

to absorb ambient vibrations, which could influence the grinding pattern negatively.

Centralised Lubrication System (61-00321-0032) /中央冷却系统

a time-controlled, automatic supply of all lubrication points through a central pump



Additional cost for software modification/软件变更额外收费
for compensation of the different wheel wear of the two grinding wheels without Marposs Electronic Sizing Control. No automatic control circuit, the wheel wear values have to be calculated.
Also incorporated in the control is a cycle counter for control of the TWIN grinding wheel wear.

Options/可选配置项目

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Chamfering spindle ( 2/60-00285-0101) TSAV 80 du x 280

倒角研磨主轴装置(倒角研磨可作为配置一体机用)
A second grinding station is used for simultaneous chamfering of the blocks.
The grinding process is a single step one. A short stroke cylinder (60-00351-0067) automatically lifts the grinding wheel when the table is in fast motion, thus conserving the work piece surface. Positioning of the spindle is effected manually.


Spindle speed:                    n= 4000 rpm
Power                          N= 2,2 kW
Voltage / Frequency            400 V, 50 cycles



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Block handling with automatic rotating unit and intermediate depositing rack

工件全自动取料和放料操作系统

The work piece to be ground is taken from the intermediate depositing table, placed on the machine table by a transport system and subsequently clamped onto the machine table by vacuum.
The work piece is automatically turned in the grinding area by the rotating unit to enable grinding of all 4 work piece surfaces. At the end of the grinding-/polishing cycle the work piece is placed back on the intermediate depositing table.



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Electronic Sizing Control (60-00213-0258)/电子尺寸控制系统

Before grinding, a one point measurement is carried out at each side of the brick. The value measured is transmitted to the grinding head down feed controller which calculates the starting position and the down feed value per grinding step.

Before grinding, the sizing control unit also monitors the block input dimensions, as  certain block dimensions are necessary to start the grinding process,

Power supply: 230 V, 50/60 cycles
Complete with all accessories.

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Dressing device ( 60-00003-0035)/研磨砂轮修整装置

For dressing the TWIN grinding wheels and chamfering wheels

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Communication Interface/通讯交互系统

For Siemens PLC for remote maintenance, through analogue modem

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Table Vacuum plate (60-00320-0098)/工作台真空吸板

for blocks lengths 190 –290 mm (适用于工件长度190-290MM

Accessories for grinding of blocks of different sizes/不同尺寸工件的可选配件

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Gripper Vacuum Plate (2/94-01270-1148)/真空抓取吸盘装置

For block lengths of 125 mm x 125 mm x 190 mm up to 290 mm
125 mm x 125 mm x 190 mm up to 290 mm
的真空抓取吸盘装置。

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Gripper Vacuum Plate (2/94-01270-1147)

For block lengths of 150 mm x 150 mm x 190 mm up to 290 mm
150 mm x 150 mm x 190 mm up to 290 mm
的真空抓取吸盘装置。

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Gripper Vacuum Plate (2/94-01270-1146)

For block lengths of 156 mm x 156 mm x 190 mm up to 290 mm
156 mm x 156 mm x 190 mm up to 290 mm
的真空抓取吸盘装置。

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Gripper Vacuum Plate (2/94-01270-1154)

For block lengths of 125 mm x 125 mm x 110 mm up to 180 mm
125 mm x 125 mm x 110 mm up to 180 mm
的真空抓取吸盘装置。

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Gripper Vacuum Plate (2/94-01270-1159)

For block lengths of 150 mm x 150 mm x 110 mm up to 180 mm
150 mm x 150 mm x 110 mm up to 180 mm
的真空抓取吸盘装置。

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Gripper Vacuum Plate (2/94-01270-1153)

For block lengths of 156 mm x 156 mm x 110 mm up to 180 mm
156 mm x 156 mm x 110 mm up to 180 mm
的真空抓取吸盘装置。

TWIN Grinding Wheels for grinding the Workpiece/研磨砂轮可选项目

The specification depends on the material used as well as the customer’s specification,

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Inner  Fine Grinding Wheel Diamond Cup Grinding Wheel (90-00625-0140)

Ø 200, 6A2 200-5-3,5-180
内圆精细研磨金刚石杯型砂轮Ø 200, 6A2 200-5-3,5-180

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Outer Rough Grinding Diamond Cup Grinding Wheel (90-00625-0422)

Ø 220, special design 220-5-3,5-180
外圆粗研磨金刚石杯型砂轮Ø 220, special design 220-5-3,5-180

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Diamond Cup Grinding Wheel (90-00625-0019)

Ø 125 mm, for chamfering for multi crystalline material

Ø 125 mm金刚石研磨砂轮(多晶硅用)

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Diamond Cup Grinding Wheel (90-00625-0018/0019)

Ø 125 mm, combined, for chamfering for mono crystalline material

Ø 125 mm金刚石研磨砂轮(单晶硅倒角研磨用)

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Dressing stone for rough grinding wheel (2/90-00629-0051)
粗研磨砂轮修整器

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Dressing stone for fine grinding wheel (2/90-00629-0065)    

精细研磨砂轮修整器

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UPS/不间断电源装置
A voltage drop of 30 % of nominal voltage in 200 ms should not cause any distortion or damage the  ongoing process

Standard Voltage
400 V AC / 50 Hz / 3 Ph / N / PE

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Special Voltage

Standard Colour
Machine base and electro cabinet             Blue DIN 1843 RAL 5010
Splash guard                             Anthracite DIN 1843 RAL 7016
Handling Blue                             DIN 1843 RAL 5010


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Special colour